replication but also complex three dimensional shapes such as lens surfaces,
and multi height structures such as vias and interconnect or diffractive optical
elements. It is likely that early adopters of imprint use these unique patterning
capabilities.
2 D patterns
- Devices
- Pillars
- Posts
- Line / gratings
- Etch and lift off
3 D patterns
- Microlens
- Tgates
- 2 layer interconnect
- Microfludics
- Bridge structures
- Lattice structures
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