Patents
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7,943,081 Step and repeat imprint lithography processes
7,939,131 Method to provide a layer with uniform etch characteristics
7,906,180 Composition for an etching mask comprising a silicon-containing material
7,906,058 Bifurcated contact printing technique
7,845,931 Polymerization technique to attenuate oxygen inhibition of solidification of liquids and composition therefor
7,727,453 Step and repeat imprint lithography processes
7,7442,33 Capillary imprinting technique
7,338,275 Formation of discontinuous films during an imprint lithography process
7,281,921 Scatterometry alignment for imprint lithography
7,279,113 Method of forming a compliant template for UV imprinting
7,252,715 System for dispensing liquids
7,224,443 Imprint lithography substrate processing tool for modulating shapes of substrates
7,157,036 Method to reduce adhesion between a conformable region and a pattern of a mold
7,140,861 Compliant hard template for UV imprinting
7,122,482 Methods for fabricating patterned features utilizing imprint lithography
7,122,079 Composition for an etching mask comprising a silicon-containing material
7,090,716 Single phase fluid imprint lithography method
7,077,992 Step and repeat imprint lithography processes
7,071,088 Method for fabricating bulbous-shaped vias
7,070,405 Alignment systems for imprint lithography
7,027,156 Scatterometry alignment for imprint lithography
7,019,835 Method and system to measure characteristics of a film disposed on a substrate
7,019,819 Chucking system for modulating shapes of substrates
6,982,783 Chucking system for modulating shapes of substrates
6,980,282 Method for modulating shapes of substrates
6,936,194 Functional patterning material for imprint lithography processes”
6,932,934 Formation of discontinuous films during an imprint lithography process”
6,926,929 System and method for dispensing liquids
6,916,584 Alignment methods for imprint lithography
6,900,881 Step and repeat imprint lithography systems
6,408,260 Laser lithography quality alarm system
6,344,860 Methods and apparatus for a stereoscopic graphic user interface
5,966,212 High-speed, high-resolution, large area inspection using multiple optical fourier transform cells
5,656,942 Prober and tester with contact interface for integrated circuits containing wafer held docked in a vertical plane”
5,966,212 High Speed, High Resolution, Large Area Inspection using Multiple Optical Fourier Transform Cells
5,506,676 Defect Detection using Fourier Optics and a Spatial Separator for Simultaneous Optical Computing
4,857,738 Absorbtion measurements of materials
4,874,240 Characterization of semiconductor resist materials
4,362,809 Multilayer photoresist utilizing an absorbent dye
7,939,131 Method to provide a layer with uniform etch characteristics
7,906,180 Composition for an etching mask comprising a silicon-containing material
7,906,058 Bifurcated contact printing technique
7,845,931 Polymerization technique to attenuate oxygen inhibition of solidification of liquids and composition therefor
7,727,453 Step and repeat imprint lithography processes
7,7442,33 Capillary imprinting technique
7,338,275 Formation of discontinuous films during an imprint lithography process
7,281,921 Scatterometry alignment for imprint lithography
7,279,113 Method of forming a compliant template for UV imprinting
7,252,715 System for dispensing liquids
7,224,443 Imprint lithography substrate processing tool for modulating shapes of substrates
7,157,036 Method to reduce adhesion between a conformable region and a pattern of a mold
7,140,861 Compliant hard template for UV imprinting
7,122,482 Methods for fabricating patterned features utilizing imprint lithography
7,122,079 Composition for an etching mask comprising a silicon-containing material
7,090,716 Single phase fluid imprint lithography method
7,077,992 Step and repeat imprint lithography processes
7,071,088 Method for fabricating bulbous-shaped vias
7,070,405 Alignment systems for imprint lithography
7,027,156 Scatterometry alignment for imprint lithography
7,019,835 Method and system to measure characteristics of a film disposed on a substrate
7,019,819 Chucking system for modulating shapes of substrates
6,982,783 Chucking system for modulating shapes of substrates
6,980,282 Method for modulating shapes of substrates
6,936,194 Functional patterning material for imprint lithography processes”
6,932,934 Formation of discontinuous films during an imprint lithography process”
6,926,929 System and method for dispensing liquids
6,916,584 Alignment methods for imprint lithography
6,900,881 Step and repeat imprint lithography systems
6,408,260 Laser lithography quality alarm system
6,344,860 Methods and apparatus for a stereoscopic graphic user interface
5,966,212 High-speed, high-resolution, large area inspection using multiple optical fourier transform cells
5,656,942 Prober and tester with contact interface for integrated circuits containing wafer held docked in a vertical plane”
5,966,212 High Speed, High Resolution, Large Area Inspection using Multiple Optical Fourier Transform Cells
5,506,676 Defect Detection using Fourier Optics and a Spatial Separator for Simultaneous Optical Computing
4,857,738 Absorbtion measurements of materials
4,874,240 Characterization of semiconductor resist materials
4,362,809 Multilayer photoresist utilizing an absorbent dye
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