Patents
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U.S.P. 6,936,194 “Functional patterning material for imprint lithography processes”
U.S.P. 6,932,934 “Formation of discontinuous films during an imprint lithography process”
U.S.P. 6,926,929 “System and method for dispensing liquids”
U.S.P. 6,916,584 “Alignment methods for imprint lithography”
U.S.P. 6,900,881 “Step and repeat imprint lithography systems”
U.S.P. 6,408,260 “Laser lithography quality alarm system “
U.S.P. 5,966,212 “High-speed, high-resolution, large area inspection using multiple optical fourier transform cells
U.S.P. 5,656,942 “ Prober and tester with contact interface for integrated circuits containing wafer held docked in a vertical plane”
U.S.P 5,966,212 “High Speed, High Resolution, Large Area Inspection using Multiple Optical Fourier Transform Cells”
U.S.P. 5,506,676 “Defect Detection using Fourier Optics and a Spatial Separator for Simultaneous Optical Computing”
U.S.P. 4,857,738 "Absorbtion measurements of materials"
U.S.P. 4,874,240 "Characterization of semiconductor resist materials"
U.S.P. 4,362,809 "Multilayer photoresist utilizing an absorbent dye
U.S.P. 6,932,934 “Formation of discontinuous films during an imprint lithography process”
U.S.P. 6,926,929 “System and method for dispensing liquids”
U.S.P. 6,916,584 “Alignment methods for imprint lithography”
U.S.P. 6,900,881 “Step and repeat imprint lithography systems”
U.S.P. 6,408,260 “Laser lithography quality alarm system “
U.S.P. 5,966,212 “High-speed, high-resolution, large area inspection using multiple optical fourier transform cells
U.S.P. 5,656,942 “ Prober and tester with contact interface for integrated circuits containing wafer held docked in a vertical plane”
U.S.P 5,966,212 “High Speed, High Resolution, Large Area Inspection using Multiple Optical Fourier Transform Cells”
U.S.P. 5,506,676 “Defect Detection using Fourier Optics and a Spatial Separator for Simultaneous Optical Computing”
U.S.P. 4,857,738 "Absorbtion measurements of materials"
U.S.P. 4,874,240 "Characterization of semiconductor resist materials"
U.S.P. 4,362,809 "Multilayer photoresist utilizing an absorbent dye